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We report on the fabrication and metrology of superconducting caps for qubit circuits.
F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Francais, Y. Mita, T. Bourouina, Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures, Microelectronics Journal 36
2005
Earlier work this paper cites.
Hanhee Paik, et al., Observation of High Coherence in Josephson Junction Qubits Measured in a Three-Dimensional Circuit QED Architecture, Phys. Rev. Lett. 107
2011
Earlier work this paper cites.
D. Rosenberg, et al., 3D integrated superconducting qubits, arXiv:1706.04116 (2017)
2017
Cited alongside, same era.
M. Mohseni, et. al., Commercialize quantum technologies in five years, Nature 543
2017
Cited alongside, same era.
2017
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