Industrial 300$\,$mm wafer processed spin qubits in natural silicon/silicon-germanium

Understand

The realisation of an universal quantum computer will require the operation of thousands to millions of qubits.

• The possibility of using existing industrial semiconductor fabrication techniques and infrastructure for up-scaling and reproducibility makes silicon based spin qubits one of the most promising platforms to achieve this goal.
• The implementation of the up to now largest semiconductor based quantum processor was realized in a silicon/silicon-germanium heterostructure known for its low charge noise, long qubit coherence times and fast driving speeds, but the high structural complexity creates challenges for industrial implementations.
• Here we demonstrate quantum dots hosted in a natural Si/SiGe heterostructure fully fabricated by an industrial 300$\,$mm semiconductor wafer process line from heterostructure growth to Co micromagnet monolithic integration.