Microfabrication technology for large LEKID arrays : from NIKA2 to future applications

Understand

The Lumped Element Kinetic Inductance Detectors (LEKID)demonstrated full maturity in the NIKA (New IRAM KID Arrays)instrument.

• These results allow directly comparing LEKID performance with other competing technologies (TES, doped silicon) in the mm and sub-mm range.
• A continuing effort is ongoing to improve the microfabrication technologies and concepts in order to satisfy the requirements of new instruments.
• More precisely, future satellites dedicated to CMB (Cosmic Microwave Background) studies will require the same focal plane technology to cover, at least, the frequency range of 60 to 600 GHz.